Archive/A Safe and Portable CMUT Array Ultrasonic System for Bubble Sizing in Industrial Silicone Sealing Rings
A Safe and Portable CMUT Array Ultrasonic System for Bubble Sizing in Industrial Silicone Sealing Rings
Changde He, Shuo Liu, Hanchi Chai et al.
24. Juli 2026
en

Abstract

To address the need for bubble detection in industrial silicone sealing rings, this paper presents a compact non-invasive ultrasonic monitoring system based on a capacitive micromachined ultrasonic transducer (CMUT) array, aiming to overcome the limitations of conventional X-ray inspection in terms of safety, portability, and real-time in situ monitoring. The system comprises two 8.8 mm × 8.8 mm CMUT arrays with associated transmitting and receiving circuitry. The silicone thickness is determined using the time-of-flight (TOF) method, while bubble size is quantitatively estimated by combining received signal amplitude analysis, which characterizes bubble-induced attenuation, with correlation function evaluation. Experimental measurements on industrial-grade silicone samples and finite element simulations demonstrate that the system achieves a spatial resolution of 0.5 mm and effectively captures attenuation variations caused by bubbles. The integrated strategy of TOF, amplitude analysis, and correlation assessment ensures reliable non-destructive evaluation. Compared with X-ray inspection, the proposed system is safer, more portable, and suitable for real-time on-site monitoring, thereby significantly improving quality control efficiency in silicone manufacturing. This study provides a novel CMUT-array-based solution for quantitative bubble detection in silicone media, offering both high resolution and practical application potential.

IPC Classification

G06B60H01

Keywords

safeportablecmutarrayultrasonicsystembubblesizingindustrialsiliconesealingringsmicromachinesaddressneeddetectionpaperpresentscompactnon-invasivemonitoringbasedcapacitivemicromachined
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