Archive/Effect of Bias Voltage on Multi-Element Nitride CAE-PVD Coatings on Ti6Al4V
Effect of Bias Voltage on Multi-Element Nitride CAE-PVD Coatings on Ti6Al4V
Cheng-Hsun Hsu, Ting-An Shih, Hong-Wei Chen et al.
23 juillet 2026
en

Abstract

Ti6Al4V alloy is widely used in biomedical and engineering applications; however, its limited wear resistance and lack of intrinsic antibacterial activity restrict its long-term performance. Although multi-element nitride coatings prepared by cathodic arc evaporation (CAE) have shown considerable potential, the influence of substrate bias voltage on their microstructural evolution and multifunctional performance remains insufficiently understood. In this study, (TiCrCuZrAlAg)N multi-element nitride coatings were deposited on Ti6Al4V substrates by CAE under substrate bias voltages of 50, 100, and 150 V. The effects of bias voltage on coating composition, crystal structure, hardness, wear behavior, and antibacterial performance were systematically investigated. Increasing the bias voltage enhanced ion bombardment, leading to reduced coating thickness, lower Cu/Ag incorporation, and degraded crystallinity, which consequently affected coating performance. Among the investigated conditions, the coating deposited at 50 V exhibited the highest hardness (1628.4 HV), the lowest wear rate (0.08 × 10−7 g/m), and the highest antibacterial efficiency (99.2%). This study establishes a correlation between substrate bias voltage, microstructural evolution, and multifunctional performance in CAE-deposited (TiCrCuZrAlAg)N coatings, providing practical guidance for the design of multifunctional protective coatings.

IPC Classification

A61A01B60

Keywords

effectbiasvoltagemulti-elementnitridecae-pvdcoatingsti6al4vsurfacesalloywidelyusedbiomedicalengineeringapplicationshoweverlimitedwearresistancelackintrinsicantibacterialactivityrestrict
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